Advanced Material Fine ceramic products of semiconductor equipment

SiC Ceramic Parts

【Characteristics】
・ High purity
・ High Density
・ High thermal conductivity
【Features】
・ Fewer metal contamination
on wafers
・ Excellent outgas performance and
few particles
・ Excellent cooling rate and
thermal response

Products

Applications Products
Plasma Etch system / apparatus Shower plate, Focus ring etc.
Plasma CVD apparatus ,
thermal CVD apparatus
Susceptor etc.
Thermal processing apparatus Susceptor, wafer holder etc.
SiC ceramic parts Focus ring / Shower plate
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